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International Conference on Plasma Sciences

24-28 May 2020, Singapore

Program / Plenary speakers

Plenary speakers

2020 IEEE Marie Sklodowska-Curie Award Winner

Michael A. Lieberman

University of California, Berkeley, USA

Monday, 25 May 2020
08:30 - 09:15

"Nonlinearlity and waves in capacitively-coupled plasma processing discharges"

Michael A. Lieberman

University of California, Berkeley, USA

Michael A. Lieberman, Professor of the Graduate School at the University of California, Berkeley, received his B.S. and M.S. degrees from the Massachusetts Institute of Technology in 1962. He received his Ph.D. degree from Massachusetts Institute of Technology in 1966. He joined the Department of Electrical Engineering and Computer Sciences (EECS) at Berkeley in 1967. In 1971, he received the Distinguished Teaching Award of the Berkeley campus. In 1990-1995, he was Director of the Berkeley Electronics Research Laboratory.

He is a Fellow of the American Physical Society (APS), the American Association for the Advancement of Science (AAAS), the Institute of Electrical and Electronic Engineers (IEEE), the American Vacuum Society, the Institute of Physics (Great Britain), and the International Plasma Chemistry Society. He received the IEEE Plasma Science and Applications Award in 1995, the von Engel Prize of the International Union of Pure and Applied Physics in 2005, and the American Physical Society Will Allis Prize for Study of Ionized Gases in 2006.

Professor Lieberman's research interests have been theoretical, experimental, and computer simulations of low temperature plasmas, fusion plasmas, and nonlinear dynamical systems. In low temperature plasmas, he contributed to the study of radio frequency plasma sheath dynamics, global modeling of discharges, standing wave and skin effects in capacitive discharges, plasma immersion ion implantation, pulsed plasmas, Fermi acceleration and stochastic heating, and atmospheric pressure discharges, with applications to integrated circuit fabrication, the plasma processing of materials, and biomedicine. In nonlinear dynamics he investigated the transition to dynamical stochasticity and Arnold diffusion. In fusion physics he did experiments and theory on hot electron magnetic mirror compression, electron cyclotron heating, and multiple mirror confinement and stability.

Professor Lieberman has written over 240 journal articles and two books. His first monograph, co-authored with Prof. A.J. Lichtenberg, Regular and Stochastic Motion, was published by Springer-Verlag in 1983; a Russian language edition subsequently appeared. A second, more comprehensive edition, Regular and Chaotic Dynamics, was published in 1991. His second book, also co-authored with A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, was published by John Wiley and Sons in 1994. An expanded second edition was published in 2005. Two Chinese language and two Japanese language editions have since been published.

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